CMP Seminar: Dry Vacuum and Automated Processes for Perovskite Solar Cell Fabrication

Current efforts in thin film deposition focus on achieving compatibility with large-scale applications and high reproducibility. Thermal vacuum deposition, a widely used technique in the semiconductor and OLED industries, has been attempted to apply to hybrid perovskite films. However, controlling the sublimation of organic precursors such as CH3NH3I in vacuum process challenges due to abnormal adsorption behaviour, leading to difficulties in control. This presentation will review perovskite fabrication methods using vacuum processes, introduce fully vacuum-processed solar cells, and discuss the growth and deposition kinetics of perovskite films to improve control in vacuum processing. In addition, I will share the latest research on vacuum-processed perovskite solar cells conducted at KRICT. I will also introduce research on automated perovskite solar cell fabrication using a robotic arm for multi-layer stacking via spin coating, along with the application of machine learning in this process.