Microprobe techniques in SAW measurements
Proceedings of the XI Intern. Microwave Conf. MIKON-96 (1996) 107-111
Wellenfelder in Interdigitalwandlern und ihre Abstrahlung
Fortschritte der Akustik – DAGA96 DEGA (1996) 434-435
Microprobe techniques in SAW measurements
Archives of Acoustics Polish Academy of Sciences 21:2 (1996) 195-200
Abstract:
Starting from the conventional microprobe techniques, a scanning acoustic tunneling microscope (SATM) and a scanning acoustic force microscope (SAFM) have been developed to detect particle displacements at solid surfaces up to GHz frequencies. Based on the non-linear dependence of the tunneling current in SATM and of the forces in SAFM on the tip to surface distance, respectively, it is demonstrated that wave field parameters of surface acoustic waves can be measured with a lateral resolution in the submicrometer range.Scanning acoustic force microscope measurements on grating-like electrodes
Applied Physics A Materials Science & Processing 61:3 (1995) 237-242
Abstract:
Grating-like metal electrodes supplied with high- and low-frequency voltages were investigated by a Scanning Acoustic Force Microscope (SAFM). On piezoelectric LiNbO3, these electrodes form an interdigital transducer which generates surface acoustic waves according to the charge distribution on its electrodes when excited at a transducer's passband frequency. The influence of surface deformation and of surface charges on the cantilever deflection of the SAFM in contact and non-contact mode was systematically studied. Comparing the images of the electrodes which were prepared on piezoelectric and dielectric substrates, surface deformation and charge distributions were qualitatively separated. © 1995 Springer-Verlag.Probing of oscillating surfaces by a scanning acoustic tunneling microscope
Thin Solid Films 264:2 (1995) 226-229