Towards the determination of elastic constants on a submicron scale using scanning acoustic force microscopy

Proceedings of the IEEE Ultrasonics Symposium 1 (1997) 549-552

Authors:

T Hesjedal, E Chilla, HJ Froehlich

Abstract:

This paper reports first steps towards the determination of elastic constants with submicron lateral resolution. The experimental phase velocity dispersion data were obtained on a micron scale using scanning acoustic force microscopy. The minimum of the corresponding error field is only weakly localized, thus giving a large error for the elastic constants. The localization can not be increased by using more of data points. In order to decrease the elastic constant's error, a Love mode is additionally regarded. However, the error field crossing is in this case not leading to a significant increase of the accuracy. We propose the inclusion of further surface guided modes.

High resolution visualization of acoustic wave fields within surface acoustic wave devices

Applied Physics Letters 70:11 (1997) 1372-1374

Authors:

T Hesjedal, E Chilla, HJ Fröhlich

Abstract:

We present the submicron visualization of surface acoustic wave (SAW) fields within interdigital transducers (IDTs) obtained by a scanning acoustic force microscope. Utilizing the nonlinear force curve of the tip-to-surface interaction, a periodic deflection of the cantilever appears when the SAWs are excited intermittently. This deflection depends on the amplitude of the surface oscillation and was measured by lock-in technique. SAWs with operating frequencies above 600 MHz were detected. The influence of the mass loading on the local oscillation amplitude was studied for various layer thicknesses of the IDT electrodes. © 1997 American Institute of Physics.

Nanoscale determination of phase velocity by scanning acoustic force microscopy

Physical Review B - Condensed Matter and Materials Physics 55:23 (1997) 15852-15855

Authors:

E Chilla, T Hesjedal, HJ Fröhlich

Abstract:

We measured the phase velocity of surface acoustic waves (SAWșs) with a scanning acoustic force microscope (SAFM) and achieved a maximum lateral resolution of 19.9 nm. The phase measurement of high-frequency waves with a slowly responding SAFM cantilever was perfomed by frequency mixing at its nonlinear force curve. For Au layers of different thicknesses the SAW dispersion was studied on a lateral scale of 200 nm and compared to calculated data. © 1997 The American Physical Society.

Scanning acoustic force microscope investigations of surface acoustic waves

Surface and Interface Analysis 25:7-8 (1997) 569-572

Authors:

T Hesjedal, E Chilla, HJ Fröhlich

Abstract:

We report on the investigation of surface acoustic wave (SAW) fields by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface oscillation therefore leads to a shift of the cantilever's rest position. With SAFM we investigated SAW transducers operating at frequencies above 600 MHz. We measured the dynamic behaviour of the wave pattern within the transducers when sweeping the frequency and found a local influence of mass loading on the standing SAW amplitude. Furthermore, the first images of SAW diffraction and scattering are shown. © 1997 by John Wiley & Sons, Ltd.

Scanning acoustic tunneling microscopy and spectroscopy: A probing tool for acoustic surface oscillations

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15:4 (1997) 1569-1572

Authors:

T Hesjedal, E Chilla, HJ Fröhlich

Abstract:

A method is presented for the universal probing of surface acoustic waves (SAWs). For measuring high frequency SAWs by scanning tunneling microscopy (STM) a stroboscopic snapshot technique was employed, named scanning acoustic tunneling microscopy. The amplitude and the phase of a state of oscillation within a SAW field are a superposition of the surface topography and the oscillation trajectory. Measuring with atomic resolution the observed contrast can be understood by a spherical tunneling model. A STM based system is proposed that reaches submicron resolution for the quantitative evaluation of elastic constants. With this system the velocity dispersion is obtained from the detection of laser generated SAW pulses by a broadband STM. Scanning acoustic tunneling spectroscopy using different acoustic modes opens a door for quantitative studies of nanoscale structures. © 1997 American Vacuum Society.